| 000 | 00834nam a22002057a 4500 | ||
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| 003 | OSt | ||
| 005 | 20250926154653.0 | ||
| 008 | 240315b ||||| |||| 00| 0 eng d | ||
| 040 | _c0 | ||
| 082 | _aDPer 621.317 Ie21 August 2022 v.37 n. 8 | ||
| 100 |
_aChen, Si. _eauthor. _954806 |
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| 245 |
_aA 13.56-MHz ZVS inverter for radio-frequency capacitively coupled plasma power supply / _cSi Chen, Xinbo Ruan, and Ying Li. |
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| 260 |
_aNew York ; _bThe Institute of Electrical and Electronics Engineers, Inc. , _cAugust 2022. |
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| 300 |
_avolume 37, pages 9481-9491 : _billustration ; _c28 cm. |
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| 500 | _aIEEE Transitions on Power Electronics, v. 37 n. 8, pages 9481-9491, August 2022. | ||
| 700 |
_aChen, Si. _eauthor. _954806 |
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| 700 |
_aRuan, Xinbo. _eauthor. _954807 |
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| 700 |
_aLi, Ying. _eauthor. _954808 |
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| 942 |
_2ddc _cPER |
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| 999 |
_c19710 _d19710 |
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