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040 _c0
082 _aDPer 621.317 Ie21 August 2022 v.37 n. 8
100 _aChen, Si.
_eauthor.
_954806
245 _aA 13.56-MHz ZVS inverter for radio-frequency capacitively coupled plasma power supply /
_cSi Chen, Xinbo Ruan, and Ying Li.
260 _aNew York ;
_bThe Institute of Electrical and Electronics Engineers, Inc. ,
_cAugust 2022.
300 _avolume 37, pages 9481-9491 :
_billustration ;
_c28 cm.
500 _aIEEE Transitions on Power Electronics, v. 37 n. 8, pages 9481-9491, August 2022.
700 _aChen, Si.
_eauthor.
_954806
700 _aRuan, Xinbo.
_eauthor.
_954807
700 _aLi, Ying.
_eauthor.
_954808
942 _2ddc
_cPER
999 _c19710
_d19710