TY  - BOOK
AU  - Chen, Si.
AU  - Chen, Si.
AU  - Ruan, Xinbo.
AU  - Li, Ying.
TI  - A 13.56-MHz ZVS inverter for radio-frequency capacitively coupled plasma power supply
U1  - DPer 621.317 Ie21 August 2022 v.37 n. 8 
PY  - 2022///
CY  - New York ; 
PB  - The Institute of Electrical and Electronics Engineers, Inc. , 
N1  - IEEE Transitions on Power Electronics, v. 37 n. 8, pages 9481-9491, August 2022
ER  -