Chen, Si. <br/><br/>
A 13.56-MHz ZVS inverter for radio-frequency capacitively coupled plasma power supply / 
Si Chen, Xinbo Ruan, and Ying Li. 
 - New York ;   The Institute of Electrical and Electronics Engineers, Inc. ,   August 2022. 
 - volume 37, pages 9481-9491 :  illustration ;  28 cm. 
<br/><br/> IEEE Transitions on Power Electronics, v. 37 n. 8, pages 9481-9491, August 2022. 
<br/><br/><label>Dewey Class. No.: </label>DPer 621.317 Ie21 August 2022 v.37 n. 8