TY  - BOOK
AU  - Lian, Yaguang
TI  - Semiconductor microchips and fabrication : : a practical guide to theory and manufacturing / [Book / Hardcover]  	
SN  - 978-1-11986778-4 
U1  - DC 621.3815 2022
PY  - 2023///]
CY  - Hoboken : 
PB  - Wiley-IEEE Press
KW  - Integrated circuits -- Design and construction
KW  - Integrated circuits -- Materials
KW  - Semiconductors -- Design and construction
N1  - Includes bibliographical references and index

ER  -